JPH0448619U - - Google Patents

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Publication number
JPH0448619U
JPH0448619U JP9172390U JP9172390U JPH0448619U JP H0448619 U JPH0448619 U JP H0448619U JP 9172390 U JP9172390 U JP 9172390U JP 9172390 U JP9172390 U JP 9172390U JP H0448619 U JPH0448619 U JP H0448619U
Authority
JP
Japan
Prior art keywords
substrate
disk
processed
disk brush
brush
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9172390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0745955Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9172390U priority Critical patent/JPH0745955Y2/ja
Publication of JPH0448619U publication Critical patent/JPH0448619U/ja
Application granted granted Critical
Publication of JPH0745955Y2 publication Critical patent/JPH0745955Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cleaning In General (AREA)
JP9172390U 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置 Expired - Lifetime JPH0745955Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9172390U JPH0745955Y2 (ja) 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9172390U JPH0745955Y2 (ja) 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置

Publications (2)

Publication Number Publication Date
JPH0448619U true JPH0448619U (en]) 1992-04-24
JPH0745955Y2 JPH0745955Y2 (ja) 1995-10-18

Family

ID=31827605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9172390U Expired - Lifetime JPH0745955Y2 (ja) 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置

Country Status (1)

Country Link
JP (1) JPH0745955Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068706A (ja) * 2004-09-06 2006-03-16 Nihon Micro Coating Co Ltd パネルクリーニング装置及び方法
JP2012075998A (ja) * 2010-09-30 2012-04-19 Avanstrate Inc シートガラスの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6885754B2 (ja) 2017-03-09 2021-06-16 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068706A (ja) * 2004-09-06 2006-03-16 Nihon Micro Coating Co Ltd パネルクリーニング装置及び方法
JP2012075998A (ja) * 2010-09-30 2012-04-19 Avanstrate Inc シートガラスの製造方法

Also Published As

Publication number Publication date
JPH0745955Y2 (ja) 1995-10-18

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term